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維修服務

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真空閥門維修服務

1.HVA valve

11110-0203 (Manual actuator) 11210-0203RS-001(Pneumatic) 2”(50mm) KF/ISO Bolted flange For AMAT DXZ & Producer / ASM E2000 RP System
16210-0403QS-00 KF/ISO Bolted flange / 4” Pneumatic gate valveFor Novellus Sequel System
21251-1003Z-001 KF/ISO Bolted flange.10”(250mm) Pneumatic gate valve for HDP CVD System
11210-1201R-001 ISO Port flange.12” (300mm)Pneumatic gate valve for Quantum System
37251-14052-001 JIS Flange 14”(350mm) Pneumatic gate valve
88291-0349R-001 Bolted body 3.5”X49.2”(88.9mmX1250mm) Slit valve. For AKT 15K PECVD System
Gate Assy Repair for the gate valve Actuator Repair Kits
Actuator Repair Kits
gate valve Repair kits for the OVERHAUL
Solenoid Kit with Gate valve

2.VAT valve

01034-KE24 ISO-KF flange/2”(50mm) Pneumatic gate valve For AMAT DXZ & Producer/ASM E2000 RP
08038-FA24 DIN Centering flange3”(80mm)Pneumatic gate valveFor VARIAN VIISION
08040-FA44 DIN Centering flange4”(100mm)Pneumatic gate valveFor VARIAN VIISION
12144-PA244 ISO-F Flange8”(200mm)Pneumatic gate valveFor VARIAN VISTA S10
02110-BA24 1.8”X9.3”(46mmX236mm) Pneumatic slit valveFor AXTRON MOCVD
12050-PA14-0003 ISO-Fflange.12” (320mm)Pneumatic gate valve

3.Others:SMC.MDC.INFICON.VARIAN.Nor-

SMC Isolation valve US14159FOR AKT System
Nor-Cal 10” valve 020421-1-01For HDP-CVD System
MDC Isolation valveAV-LAV-800-PAA02(8”) For AKT System
IFCON Angle valve 250-200For AVB010&AVB40 LL/out vent
SMC Slit valve P/N:0022-71943 REV.I. FOR AKT System (LCD 5.5 代廠)
Slit valve. For EMCORE LED System

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